Plant for multilayer multicomponent nanostructure materials and coatings.
The unit is designed for multi-component, multilayer, nanostructure materials and coatings. The plant has CALT SID technology implemented – Cathodic Arc Low Temperature Separated Ion Deposition – application of coating from separated arc discharge plasma at low temperature.
The plant is equipped with:
- two electric arc plasma sources SPS-1 with separation of plasma flow;
- one direct flow plasma source - evaporator;
- highly efficient vacuum system;
- three channel system of working gas supply;
- planetary product rotation mechanism;
- substrate power source operating in both continuous and pulse modes;
- effective high-frequency protection of products from damage by microarc discharges;
- small-sized high frequency power sources;
- modern microprocessor control system.
Read more about the plant, details about specifications of units and systems of the plant and implemented technologies.