Вакуумные камеры

 

UNITS AND SYSTEM

Vacuum chambers

Water cooling and plant unit heating systems

Product rotation mechanisms

Vacuum system

Gas supply system

Plasma sources

Powes sources.

High-frequency substrate power source

Control systems

UNITS AND SYSTEM

PLANT

Plant control systems

Control systems for our plants are built on the basis of industrial computers and controllers. Units can operate in fully automatic or manual modes. The picture shows view of the main touch-screen of plant automatic control unit with eight plasma sources.

Main touch-screen of plant automatic control unit with eight plasma sources

 

To upgrade the plants of old models, which systems and components do not allow to fully automate the process, control systems are designed on the basis of industrial controller with partial automation. The photos show control rack and individual plant control units with partial automation.

Control rack for upgraded plant of NNV-6.6

 

Control unit of vacuum system, gas system and plant heating and cooling system

 

Plasma source control unit

 

Cabinet of collection and preliminary data processing from local plant’s devices