Water cooling and heating systems.

Cooling and heating system for plant units provides:

• cooling of chamber and other units during plant operation;
• yeating of chamber walls and other components to prevent water vapor condensation and outgassing during opening of the chamber and pumping out.

The figure shows a typical cooling and heating circuit of the units, which are usually connected to the system.

The system has autonomous system of water heating. Water temperature in the system is maintained automatically by enabling/disabling heater tank and the solenoid valves, which supply and close water to the system.

The system has an alarm of the availability of water flow in individual channels and emergency shutdown system of corresponding devices at the termination of the water supply.

Cooling and heating systems are available with open and closed drainage. System with an open drainage has open funnel for water drainage. System with a closed drainage hasn’t an open drainage and is typically used for loopback autonomous cooling systems with pumps for water circulation.

The figure shows examples of cooling and heating systems.

Systems with open (left) and closed (right) drainage.