Gas supply system.

Gas supply system provides supply of a mixture of working gases with automatic maintenance of the ratio of different gases and automatic control of total consumption to maintain given pressure in the chamber.

The figure shows a scheme of two-channel gas supply system.

The scheme of two channel gas supply system

The system consists of executive unit and electronic programming control unit. Control unit is made based on high-speed gas flow sensors and pulse inlet valves. Control unit indicator displays in different modes:

• gas consumption values for each channel;
• ratio of gas consumption;
• pressure in chamber.

The number of channels in the system is determined by the requirements of a particular plant.

The figure shows an example of two channel gas supply system.

 

Two channel control unit.

 

Control unit. The examples of display of various parameters is shown to the right.