High-frequency substrate power source

Implementation of modern technologies requires high voltage sources of accelerating voltage, working both in continuous and pulse modes, with high-speed protection of microarc discharges on the surface of the substrate.

High voltage sources of our plants are made with powerful high-performance transistors and diode modules in the circuit with a high-frequency inverter, operating at frequencies up to 30kHz. They represent functionally complete product and are implemented in 19-inch form factor.

High-frequency substrate power source

High-frequency substrate power source has operating modes of both direct and pulse voltage with adjustable amplitude, duration and frequency of pulse repetition. Typical source parameters:

• in direct mode:
  • adjustable voltage from 30 to 1500 V;
  • maximum current to 40 A
  • average power 25 kW.
• in pulse mode:
  • pulse amplitude from 30 to 1500 V;
  • maximum pulse current 50 A;
  • pulse repetition rate from 10 to 10000 Hz;
  • pulse duration from 10 to 1000 microseconds;
  • pulse ratio from 2 to 100;
  • average power 25 kW.

The source has a highly efficient high-speed high frequency protection system from microarc discharges. Response time of protection is less than 10 microseconds, which virtually eliminates the possibility of surface damage with microarc discharges.

To modernize high voltage power sources of plant substrates of older models (such as NNV-6.6), high-frequency pulse modulator is developed, which connects to standard plant power source.

Pulse modulator for substrate power source подложки

Pulse modulator together with standard power source of the plant provides both direct and pulse voltage to the substrate with standard parameters:

• in direct mode:
  • adjustable voltage from 30 to 1300 V;
  • maximum current to 20 A;
• in pulse mode:
  • pulse amplitude from 30 to1300 V;
  • maximum pulse current up to 45 A;
  • pulse repetition rate from 10 to 5000 Hz;
  • pulse duration from 40 to 1000 microseconds;
  • minimal pause duration 200 microseconds.

Pulse modulator provides high-speed high-frequency protection from microarc discharges with response time not exceeding 10 microseconds.

In some models, pulse modulator can be integrated into the substrate power source. In that case, source control is implemented from a special panel placed at the front of the cabinet of power source..

Control panel of substrate power source with built-in pulse modulator