Вакуумные камеры

 

PLASMA SOURCES

Source of separated gas-metal plasma

Direct flow plasma source - evaporator

Implanter

PLASMA SOURCES

UNITS AND SYSTEMS

PLANT

Direct flow plasma source - evaporator.

Direct flow plasma source – evaporator is widely used for application of hard, wear resistant, corrosion resistant and decorative coatings for cutting tools and other products. The disadvantage is the presence in plasma flow of cathode particulate material and low degree of ionization of gas component of plasma. Presence of microparticles in plasma flow does not allow for high-quality homogeneous nanostructured multicomponent and multilayer materials and coatings. Due to the large number of “drops”, the source is practically not applicable for materials and coatings based on relatively low-melting materials. For example, for materials and coatings based on oxides and nitrides of aluminum.

Here are the direct flow plasma source scheme, photos of the source and typical damages to the coating by microparticles of cathode material. Take a look:

 

Scheme of direct flow plasma source – evaporator

 

Direct flow plasma source – evaporator (to the right – view from vacuum chamber)

 

Typical damages to the coating by microparticles of cathode material
(individual damages are shown zoomed in the bottom)