Product rotation mechanisms.

Product rotation mechanisms provide coating of products of complex shape and movement of products and substrates under a variety of plasma sources for deposition of complex multicomponent and multilayer coatings. Our plants typically use three types of mechanisms:

• planetary;
• double planetary;
• mechanism of rotation in two mutually perpendicular or inclined planes.

Planetary mechanism allows simultaneous rotation of products around its own axis and around the axis of the plant chamber. Rotation around the axis of the product provides application of coating on products with axial symmetry. Rotation around the axis of the chamber provides rotation of the product under different plasma sources, located on the sides of the chamber.Operation modes are provided:

• duble rotation around the axis of the product and the axis of the chamber
• single rotation around the axis of the chamber only for processing large-sized products with axial symmetry;
• single rotation of the product around its axis with periodic movement under different plasma sources.

Dual planetary rotation mechanism provides simultaneous triple product rotation around its axis, around the axis of the satellite and around the axis of the chamber – has additional rotation around the axis of the satellite in comparison with the planetary mechanism. It is used for more rational loading of the chamber when processing small-sized products with axial symmetry.

Mechanism of rotation in two mutually perpendicular or inclined planes is used for application of coating on products with complex shape.

Figures show the examples of rotation mechanisms of our plants.

 

Planetary rotation mechanism. (To the right – with products placed on it)

 

Mechanism of rotation in two mutually perpendicular vertical and horizontal planes.
The mechanism is shown with product mounted on it – turbine wheel. (To the right – without shield screens).