Specifications of units and systems.

Specifications of plant units and systems.

1. Vacuum chambers.
2. Water cooling and plant unit heating systems.
3. Product rotation mechanisms.
4. Vacuum system.
5. Gas supply system.
6. Plasma sources.
7. Powes sources.
8. High-frequency substrate power source.
9. Control systems.

  1. Vacuum chambers:
  2. Water cooling and plant unit heating systems.
  3. Product rotation mechanisms.
    Types of rotation mechanisms:

  4. Vacuum system:
  5. Gas supply system:
  6. Plasma sources.
    Plants are equipped with:

  7. Powes sources:
  8. High-frequency substrate power source:
  9. Control systems: