Вакуумные камеры







Plant for applying thick protective coatings on large products with complex shape.

Nitride ceramics.

Ceramic-like nanostructured materials and coatings based on Al2O3,(sapphire).

Diffusion barriers and contact layers. .

Nanoscale carbon and diamond-like coatings (DLC).

Our works.

I. Equipment.
II. Technological works.
III. New developments.

I. Equipment.

Our equipment operates at the enterprises in Russia and CIS countries, such as:

  • NPO Energomash of Academician V.P. Glushko JSC – two units VIT-7 and VIT-0;
  • AvtoVAZ JSC – three unitsVIT-6, VIT-14, VIT-15;
  • Kirovgrad hard alloys plant JSC – two unitsVIT-16 and VIT-17;
  • ALG Company LLC – two unitsVIT-18 and VIT-19;
  • Robert Bosch Saratov JSC – unit VIT-12;
  • Chepetsky mechanical plant JSC – unit VIT-13;
  • MIZ JSC (Moscow tool plant) – two units;
  • Novokramatorsk engineering plant JSC;
  • Volgaburmash JSC;
  • Kovrovsk mechanical plant JSC;
  • Rosstroymash JSC;
  • Mosshtamp plant LLC;
  • Plant of vacuum glass LLC;
  • and other companies.

at the enterprises of foreign countries, such as:

  • AIS INDUSTRIES (China) – two units;
  • Magdeburg University (Germany) – two units;
  • P. COAT P.V.D. Coating Technologies (Israel);
  • IBT group (Israel);
  • and other companies and countries.

In addition, our components and systems work on other vacuum plants both in Russia and abroad. For example at:

  • VPT-M JSC – plant and plasma source control systems;
  • NIAT JSC – plant power systems;
  • VNIIinstrument JSC – various components and systems of plants;
  • HIT (France) – plasma sources;
  • and other enterprises.

II. Technological works.

Our working technologies are developed based on core technologies for:

  • production of coatings and materials with certain given properties;
  • processing of specific products.

Working technologies typically include:

  • technology of preliminary product and substrate preparation – mechanical finishing of surface, chemical etching, degreasing, cleaning, etc.;
  • documentation for industrial equipment (for placement of products and substrates in the plant chamber, and for carrying out preliminary operations, including cleaning of products, etc.);
  • instructions for preparatory works on the plant, for placement of substrates and products in the plant chamber;
  • technological operation modes of the plant, including modes of ion cleaning, heating of products and substrates, making coatings and materials, cooling, and other phases of operation;
  • other required documents and instructions (for example, methodology for assessing the quality of resultant coatings and materials, instructions for maintenance works on the plant, etc.).

In required cases, a flowchart is composed.

In required cases, a flowchart is composed.

Deposition of TiAlN (AlTiN) deposition from monometallic cathodes – Ti and Al.
Technology of deposition of pure metals and compounds based on them.
Technology of deposition of strengthening coatings on tools for high-speed machining.
Technology of deposition of thick protective coatings.
Technology of deposition of multilayer materials and coatings.
Technology of producing diffusion near-surface layers and combined layers – diffusion sublayer + coating (e.g., azotizing + coating).

Deposition of TiAlN (AlTiN) deposition from monometallic cathodes – Ti and Al.
Technology of deposition of TiAlN (AlTiN) from monometallic cathodes is based on simultaneous operation of several plasma sources SPS-1 with different cathodes (from titanium and aluminum), formation of mixed plasma flow containing ions of titanium, aluminum and nitrogen, and their deposition on a substrate. In comparison with applied technologies with TiAlN from alloyed or sintered cathodes, our technology allows to create:

  • coatings and materials with unconditioned (given) ratio of Ti and Al elements – not limited to the relationship of elements and alloyed or sintered cathodes;
  • gradient coatings and materials – with variable ratio of elements in thickness;
  • multilayer coatings with nanoscale layer thicknesses and different content of elements in different layers.

Our technology and manufactured materials and coatings have all the benefits of CALT SID technology. In addition, monometallic cathodes are much cheaper than expensive alloyed and sintered cathodes, what significantly reduces the cost of process for making materials and coatings.

TiAlN coating technology is introduced, in particular, at MIZ JSC and ALG Company LLC for the strengthening of carbide cutting blades, including gear cutting. Blade strength in the production is increased from 3,5 to 4 times and is higher than strength of best foreign samples.

Read about о TiAlN coating at properties page.

Technology of deposition of pure metals and compounds based on them.
Working Technology of deposition of pure metals and compounds based on them are based on core CAT SID technologies and offer all the benefits of these technologies. Technologies were developed for deposition of:

  • nitrides - TiN, ZrN, CrN etc.;
  • Carbides and carbonitrides TiCN, TiC;
  • oxides such as Al2O3,TiO etc.;
  • pure metals Ti, Cr, Ni, Al etc.

Operating properties and characteristics of these materials and coatings are much higher than characteristics of similar materials obtained by conventional electrical arc methods.

Read more about characteristics of our coatings.

Technology of deposition of strengthening coatings on tools for high-speed machining.
Deposition of multi-component coatings such as TiAlN, TiAlCrN and others, having unique combination of properties – high hardness at high temperatures with thermal and chemical stability, including stability to oxidation.

Read more about the results of tests of coatings for high-speed machining at a page about the properties of coatings.

Technology of deposition of thick protective coatings.
The technology allows to make thick (up to 500 microns) gas-tight uniform nano-structured chemically neutral coatings with high adhesion to the products with complex shape. These coatings provide reliable work in aggressive environments at high temperatures.

Deposition of thick protective coatings is implemented at NPO Energomash of Academician V.P. Glushko JSC for strengthening of parts for rocket engines of first stage, working in super-aggressive environment of propellant and liquid oxygen at very high temperatures. Coatings provide required service life of rocket engines, including heavy-duty engines of new generation.

Read more about products with thick thermal barrier gas tight chemically neutral coatings..

Technology of deposition of multilayer materials and coatings.
The technology is based on alternate or combined operation of various plasma sources SPS-1 with cathodes of different materials (or alternate motion of the substrate or product under different plasma sources), alternate supply of different working gases into the chamber and alternate variation of process parameters.

Mono- or multi-component layer is formed at each stage, which composition and structure are determined by cathode material, working at this stage of plasma source, working gas and process parameters set at this stage. High adhesion between layers is due to high purity of plasma flow and intermediate ion processing of layer surfaces – ion etching, saturation of near-surface layer with working gas atoms, creating surface defects, etc.

Thicknesses of individual layers range from nanometers to several microns or tens of microns, depending on the requirements of resulting materials or coatings.

Multilayer materials with nanoscale thicknesses of individual layers have unique properties compared with monolithic materials. Multilayer coatings have significantly higher performance than single-layer ones. For example, multilayer strengthening coatings with intermediate ceramic-like layers like Al2O3 with low thermal conductivity significantly increase strength of cutting tools, including due to lower heating of tool, and allow to work in more stringent modes and at high cutting speeds.

Read more about the structure of multicomponent multilayer coating.

Technology of producing diffusion near-surface layers and combined layers – diffusion sublayer + coating (e.g., azotizing + coating).
Technology for producing diffusion layers – layers saturated with atoms of working gases such as nitrogen – is based on work of electric arc plasma source SPS-1 in gas plasma mode. The thickness of layer and time of its formation depends on substrate material, type of working gas and process parameters. Typically, within 30-40 minutes a diffusion layer with thickness of 50-100 microns is formed.

Combined layers – diffusion layer + coating – are formed in a single cycle through successive operation of plasma source in gas plasma mode and in coating deposition mode.

Service characteristics of combined coatings are above characteristics of clean surfaces, in particular, due to gradient (not sharp-step) transfer of characteristics of substrate core (product) to the characteristics of coating (including hardness, coefficient of thermal expansion, etc.).

Technology is implemented, in particular, at AIS INDUSTRIES (China), where pure diffusion layers are used for strengthening of products (for the blades of air conditioners), and combined layers (for cutting tools).

III. New developments.

We are constantly conducting research, developing new equipment and technologies. At the present time we are developing:

  1. Automated plant for applying thick protective coatings on large products with complex shape.
    The plant is designed for applying protective coatings for parts on aircraft, rocket and other heavy-duty power engines. Read more. .

  2. Technology of making materials and coatings based on nitride ceramics, including aluminum nitride AlN.
    Ceramics based on aluminum nitride possesses a unique combination of physical and electrical characteristics: abnormally high thermal conductivity, good electrical properties, moderate thermal expansion coefficient, photoelectric properties, preservation of efficiency over a wide temperature range. These properties result in the wide prospect of AlN application in microelectronics. Read more. .

  3. Technology for production of ceramic-like nanostructured layers and coatings based on Al2O3 (sapphire). Such coatings are promising for applications in microelectronics (substrates of electronic circuits, LEDs, solar cells, etc.) and engineering (reinforcing and other functional layers, including multilayer materials and coatings), etc. Read more.

  4. Technology for making diffusion barrier and contact layers for microelectronic elements, including thermoelectric converters on the basis of Peltier elements (Bi2Te3). Read more.

  5. Nanoscale carbon and diamond-like coatings (DLC).

We cooperate with many Russian and foreign scientific and technical companies. Do you have any questions, interest in cooperation and joint development? Contact us right now. We are open to cooperation.